Angular distribution of sputtered particles induced by ion bombardment

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/38551

Title:	Angular distribution of sputtered particles induced by ion bombardment
Authors:	Lee,CS;Liu,YC;Chen,YH;Lee,S
Contributors:	物理研究所
Keywords:	INDUCED PHOTON-EMISSION;INDUCED LIGHT-EMISSION;TARGETS;A1
Date:	2004
Issue Date:	2010-07-08 13:30:56 (UTC+8)
Publisher:	中央大學
Abstract:	Using a 15 keV argon ion beam to impact a polycrystalline aluminum target, the intensities of the sputtered Al particle, and the backscattered projectiles in different angle of incidence were measured. The data showed that the angular distributions of Ar
Relation:	NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Appears in Collections:	[Graduate Institute of Physics] journal & Dissertation

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