题名: | Angular distribution of sputtered particles induced by ion bombardment |
作者: | Lee,CS;Liu,YC;Chen,YH;Lee,S |
贡献者: | 物理研究所 |
关键词: | INDUCED PHOTON-EMISSION;INDUCED LIGHT-EMISSION;TARGETS;A1 |
日期: | 2004 |
上传时间: | 2010-07-08 13:30:56 (UTC+8) |
出版者: | 中央大學 |
摘要: | Using a 15 keV argon ion beam to impact a polycrystalline aluminum target, the intensities of the sputtered Al particle, and the backscattered projectiles in different angle of incidence were measured. The data showed that the angular distributions of Ar |
關聯: | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS |
显示于类别: | [物理研究所] 期刊論文
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